Normal view MARC view ISBD view

Handbook of silicon wafer cleaning technology /

Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern. - 2nd ed. - Norwich, NY : William Andrew, c2008. - xxvi, 718 p. : il. ; 24 cm. - Materials science & process technology series . - Materials science and process technology series. .

Bibliogr., indice.

ISBN: 9780815515548 0815515545

Source: 281663

Subjects--Chronological Terms:

Subjects--Topical Terms:
DE-Inginerie electronică și telecomunicații

Subjects--Geographic Terms:

Index Terms--Genre/Form:
lucrare de specialitate

Universal Decimal Class. No.: 621.382

Print
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)