Comprehensive microsystems / 
editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe. 
 - Amsterdam ;  Boston :  Elsevier,  c2008. 
 - 3 vol. :  il. ;  27 cm xxi, 583 p. (vol. 1) xx, 583 p. (vol. 2) xx, 737 p. (vol. 3) 
<br/><br/>vol. 1 :   Materials, fabrication and packaging, electronics and systems design  vol. 2 :  Actuation mechanism, physical sensing, chemical and biological systems  Optical systems, industrial applications, emerging topics 
<br/><br/><label>ISBN: </label>9780444521941 0444521941 
<br/><br/><label>Source: </label>281614-281616 
<br/><br/><label>Subjects--Chronological Terms: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>DE-Inginerie electronică și telecomunicații
<br/><br/><label>Subjects--Geographic Terms: </label>
<br/><br/><label>Index Terms--Genre/Form: </label><br/>lucrare de specialitate
<br/><br/><label>Universal Decimal Class. No.: </label>621.38.049.77:004