Handbook of silicon wafer cleaning technology / 
edited by Karen A. Reinhardt, Werner Kern. 
 - 2nd ed. 
 - Norwich, NY :  William Andrew,  c2008. 
 - xxvi, 718 p. :  il. ;  24 cm. 
 - Materials science & process technology series .
 - Materials science and process technology series. .
<br/><br/>Bibliogr., indice.  
<br/><br/><label>ISBN: </label>9780815515548 0815515545 
<br/><br/><label>Source: </label>281663 
<br/><br/><label>Subjects--Chronological Terms: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>DE-Inginerie electronică și telecomunicații
<br/><br/><label>Subjects--Geographic Terms: </label>
<br/><br/><label>Index Terms--Genre/Form: </label><br/>lucrare de specialitate
<br/><br/><label>Universal Decimal Class. No.: </label>621.382