@book{61599,
	author = {Cui, Zheng. and SpringerLink (Online service)},
	title = {Nanofabrication},
	publisher = {Springer International Publishing :},
	year = {2024.},
	address = {Cham :},
	edition = {3rd ed. 2024.},
	url = {https://doi.org/10.1007/978-3-031-62546-6}
}