04104nam a22005535i 4500 978-3-031-62546-6 DE-He213 20251030112629.0 cr nn 008mamaa 240714s2024 sz | s |||| 0|eng d 9783031625466 978-3-031-62546-6 10.1007/978-3-031-62546-6 doi TK7875 TJF bicssc TEC027000 bisacsh TJF thema Cui, Zheng. author. aut http://id.loc.gov/vocabulary/relators/aut 80574 Nanofabrication [electronic resource] : Principles, Capabilities and Limits / by Zheng Cui. 3rd ed. 2024. Cham : Springer International Publishing : Imprint: Springer, 2024. XI, 413 p. 302 illus., 81 illus. in color. online resource. text txt rdacontent computer c rdamedia online resource cr rdacarrier text file PDF rda Chapter 1. Introduction -- Chapter 2. Optical lithography -- Chapter 3. Electron beam lithography -- Chapter 4. Nanofabrication by focused ion beam -- Chapter 5. Tip-based nanofabrication -- Chapter 6. Nanoimprinting lithography -- Chapter 7. Nanoscale pattern transfer by etching -- Chapter 8. Nanoscale pattern transfer by deposition -- Chapter 9. Indirect nanofabrication -- Chapter 10. Nanofabrication by self-assembly -- Chapter 11. Applications of nanofabrication -- Chapter 9. Policing and investigating criminal activities by gangs using e-bikes, e-scooters and e-motorcycles in the United Kingdom -- Part IV-Police and Community Outreach and Collaboration. -- Chapter 10. Initiatives to improve Police – Community Collaboration and Trust -- Chapter 11. Understanding the Implementation of Community-oriented Policing in the New Zealand Police. Nanofabrication: Principles, Capabilities, and Limits provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book. Contains most of the nanofabrication techniques encountered in both industrial applications and scientific research; Presents less theoretical and more practical information and examples from the author’s own work and the literature; Provides comprehensive illustrations to help understand lithography techniques using the author’s simulation programs. Microtechnology. 65900 Microelectromechanical systems. 65901 Nanotechnology. Electronic circuits. Electronics. 65899 Microsystems and MEMS. 65903 Nanotechnology. Electronic Circuits and Systems. Electronics and Microelectronics, Instrumentation. 65902 SpringerLink (Online service) Springer Nature eBook Printed edition: 9783031625459 Printed edition: 9783031625473 Printed edition: 9783031625480 https://doi.org/10.1007/978-3-031-62546-6 ZDB-2-ENG ZDB-2-SXE 61599 61599