@book{64289,
	author = {Syed, Wajih U. and Elfadel, Ibrahim (Abe) M. and SpringerLink (Online service)},
	title = {Tapered Beams in MEMS},
	publisher = {Springer International Publishing :},
	year = {2024.},
	address = {Cham :},
	edition = {1st ed. 2024.},
	url = {https://doi.org/10.1007/978-3-031-66391-8}
}