<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Handbook of silicon carbide materials and devices</title>
  </titleInfo>
  <name type="personal">
    <namePart>Feng, Zhe Chuan</namePart>
    <role>
      <roleTerm type="text">editor.</roleTerm>
    </role>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">flu</placeTerm>
    </place>
    <dateIssued encoding="marc">2023</dateIssued>
    <copyrightDate encoding="marc">2023</copyrightDate>
    <edition>First edition.</edition>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <extent>1 online resource (xix, 444 pages) : illustrations.</extent>
  </physicalDescription>
  <abstract>"This handbook presents the key properties of silicon carbide (SiC), the power semiconductor for the 21st century. It describes related technologies, reports the rapid developments and achievements in recent years, and discusses the remaining challenging issues in the field. The book consists of 15 chapters, beginning with a chapter by Professor W. J. Choyke, the leading authority in the field, and is divided into four sections. The topics include presolar SiC history, vapor-liquid-solid growth, spectroscopic investigations of 3C-SiC/Si, developments and challenges in the 21st century; CVD principles and techniques, homo-epitaxy of 4H-SiC, cubic SiC grown on 4H-SiC, SiC thermal oxidation processes and MOS interface, raman scattering, NIR luminescent studies, Mueller matrix ellipsometry, raman microscopy and imaging, 4H-SiC UV photodiodes, radiation detectors, and short wavelength and synchrotron X-ray diffraction. This comprehensive work provides a strong contribution to the engineering, materials, and basic science knowledge of the 21st century, and will be of interest to material growers, designers, engineers, scientists, postgraduate students, and entrepreneurs"--</abstract>
  <note type="statement of responsibility">edited by Zhe Chuan Feng.</note>
  <subject authority="lcsh">
    <topic>Electronics</topic>
    <topic>Materials</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Silicon carbide</topic>
    <topic>Electric properties</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductor films</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Epitaxy</topic>
  </subject>
  <subject authority="bisacsh">
    <topic>SCIENCE / Physics</topic>
  </subject>
  <subject authority="bisacsh">
    <topic>TECHNOLOGY / Material Science</topic>
  </subject>
  <classification authority="lcc">TK7871.15.S56 H36 2023</classification>
  <relatedItem type="series">
    <titleInfo>
      <title>Series in materials science and engineering</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">9780429198540</identifier>
  <identifier type="isbn">042919854X</identifier>
  <identifier type="isbn">9780429579837</identifier>
  <identifier type="isbn">0429579837</identifier>
  <identifier type="isbn">9780429583957</identifier>
  <identifier type="isbn">0429583958</identifier>
  <identifier type="isbn">9780429582059</identifier>
  <identifier type="isbn">0429582056</identifier>
  <identifier type="isbn" invalid="yes"/>
  <identifier type="isbn" invalid="yes"/>
  <identifier type="uri">https://www.taylorfrancis.com/books/9780429198540</identifier>
  <identifier type="uri">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</identifier>
  <location>
    <url displayLabel="Taylor &amp; Francis">https://www.taylorfrancis.com/books/9780429198540</url>
  </location>
  <location>
    <url displayLabel="OCLC metadata license agreement">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</url>
  </location>
  <recordInfo>
    <recordContentSource authority="marcorg">OCoLC-P</recordContentSource>
    <recordCreationDate encoding="marc">220723</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251030122307.0</recordChangeDate>
    <recordIdentifier source="FlBoTFG">9780429198540</recordIdentifier>
    <languageOfCataloging>
      <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
    </languageOfCataloging>
  </recordInfo>
</mods>
