000 04104nam a22005535i 4500
001 978-3-031-62546-6
003 DE-He213
005 20251030112629.0
007 cr nn 008mamaa
008 240714s2024 sz | s |||| 0|eng d
020 _a9783031625466
_9978-3-031-62546-6
024 7 _a10.1007/978-3-031-62546-6
_2doi
050 4 _aTK7875
072 7 _aTJF
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTJF
_2thema
100 1 _aCui, Zheng.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_980574
245 1 0 _aNanofabrication
_h[electronic resource] :
_bPrinciples, Capabilities and Limits /
_cby Zheng Cui.
250 _a3rd ed. 2024.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2024.
300 _aXI, 413 p. 302 illus., 81 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aChapter 1. Introduction -- Chapter 2. Optical lithography -- Chapter 3. Electron beam lithography -- Chapter 4. Nanofabrication by focused ion beam -- Chapter 5. Tip-based nanofabrication -- Chapter 6. Nanoimprinting lithography -- Chapter 7. Nanoscale pattern transfer by etching -- Chapter 8. Nanoscale pattern transfer by deposition -- Chapter 9. Indirect nanofabrication -- Chapter 10. Nanofabrication by self-assembly -- Chapter 11. Applications of nanofabrication -- Chapter 9. Policing and investigating criminal activities by gangs using e-bikes, e-scooters and e-motorcycles in the United Kingdom -- Part IV-Police and Community Outreach and Collaboration. -- Chapter 10. Initiatives to improve Police – Community Collaboration and Trust -- Chapter 11. Understanding the Implementation of Community-oriented Policing in the New Zealand Police.
520 _aNanofabrication: Principles, Capabilities, and Limits provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book. Contains most of the nanofabrication techniques encountered in both industrial applications and scientific research; Presents less theoretical and more practical information and examples from the author’s own work and the literature; Provides comprehensive illustrations to help understand lithography techniques using the author’s simulation programs.
650 0 _aMicrotechnology.
_965900
650 0 _aMicroelectromechanical systems.
_965901
650 0 _aNanotechnology.
650 0 _aElectronic circuits.
650 0 _aElectronics.
_965899
650 1 4 _aMicrosystems and MEMS.
_965903
650 2 4 _aNanotechnology.
650 2 4 _aElectronic Circuits and Systems.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
_965902
710 2 _aSpringerLink (Online service)
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783031625459
776 0 8 _iPrinted edition:
_z9783031625473
776 0 8 _iPrinted edition:
_z9783031625480
856 4 0 _uhttps://doi.org/10.1007/978-3-031-62546-6
912 _aZDB-2-ENG
912 _aZDB-2-SXE
999 _c61599
_d61599