| 000 | 03385nam a22003974u 4500 | ||
|---|---|---|---|
| 001 | 10.1002/9781394174232 | ||
| 003 | Wiley | ||
| 005 | 20251030120308.0 | ||
| 007 | cr nn 008mam|a | ||
| 008 | 231211t2023||||xxu fs| |0|| 0|eng|| | ||
| 020 |
_a9781394174232 _qelectronic |
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| 024 | 7 |
_a10.1002/9781394174232 _2doi |
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| 041 | _aeng | ||
| 100 | 1 |
_aO'Hanlon, John F. _4aut _991572 |
|
| 245 | 1 | 2 |
_aA Users Guide to Vacuum Technology _h[electronic resource] _cJohn F. O'Hanlon, Timothy A. Gessert |
| 250 | _a1 | ||
| 260 |
_bWiley _c2023 |
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| 264 | 1 |
_bWiley _c2023 |
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| 300 | _a576pp.; | ||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _2rdaft |
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| 347 | _bPDF | ||
| 520 | _aA USERS GUIDE TO VACUUM TECHNOLOGY Choose and understand the vacuum technology that fits your project's needs with this indispensable guide Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind. For decades, A User's Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems. Readers of the fourth edition of A User's Guide to Vacuum Technology will also find: Expanded treatment of gauges, pumps, materials, systems, and best??operating practices Detailed discussion of cutting-edge topics like ultraclean vacuum and contamination control An authorial team with decades of combined research and engineering experience A User's Guide to Vacuum Technology is essential for those entering emerging STEM programs, engineering professionals and graduate students working with a huge range of engineering technologies. | ||
| 650 | 4 |
_aComponent Manufacturing _991573 |
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| 650 | 4 |
_aElectronic Materials _967191 |
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| 650 | 4 |
_aPower Technology & Power Engineering _991574 |
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| 653 | 0 | 0 | _aVacuum systems contamination; ultraclean pumps vacuum; cryogenic-pumped systems; high vacuum chambers; rough vacuum pumping; pump fluids; lubrication; materials in vacuum; cryogenic pumps; getter pumps; ion pumps; diffusion pumps; contamination control. |
| 700 | 1 |
_aGessert, Timothy A. _4aut _991575 |
|
| 776 | 0 | 8 |
_iPrinted edition: _z9781394174133 |
| 856 | 4 | 0 |
_uhttps://doi.org/10.1002/9781394174232 _aWiley Online Library |
| 856 | 4 | 0 |
_uhttps://onlinelibrary.wiley.com/action/showBook?doi=10.1002%2F9781394174232 _aWiley Online Library |
| 856 | 4 | 2 |
_3Cover Image _uhttps://onlinelibrary.wiley.com/cms/asset/a48e025f-4847-4ec0-9988-12141b349aef/9781394174232.cover.gif _aWiley Online Library |
| 999 |
_c67001 _d67001 |
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